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Tabletop CMP device Product List

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Desktop CMP System : Melissa300D/400D

Supports wafer sizes up to φ6 inch. Specially designed for CMP.

Since its establishment in 2003 as a company providing CMP contract processing services, D-process, which has numerous achievements in CMP processing, offers and provides desktop CMP equipment ideal for research and development purposes. From this page, you can download the catalog for the "Melissa300D," which features a φ300mm platen suitable for wafers up to φ4 inches. For the φ400mm platen specification, which accommodates wafers up to φ6 inches, detailed information can be provided separately by our sales representative. Please feel free to contact us.

  • CMP Equipment
  • Tabletop CMP device

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